|ITEM METADATA RECORD
|Title: ||Influence of oxygen on the analysis of oxynitrides: N-diffusion or ionization?|
|Authors: ||De Witte, Hilde|
|Issue Date: ||2000 |
|Conference: ||SIMS Workshop; 1-2 May 2000; Lake Tahoe, CA, USA.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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