Title: Influence of oxygen on the analysis of oxynitrides: N-diffusion or ionization?
Authors: De Witte, Hilde
Conard, Thierry
Vandervorst, Wilfried
Issue Date: 2000
Conference: SIMS Workshop; 1-2 May 2000; Lake Tahoe, CA, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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