Title: SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding
Authors: De Witte, Hilde ×
Conard, Thierry
Vandervorst, Wilfried
Gijbels, Renaat #
Issue Date: Nov-2000
Publisher: John Wiley & Sons
Series Title: Surface and Interface Analysis vol:29 issue:11 pages:761-765
ISSN: 0142-2421
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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