Title: Study of oxynitrides with dual beam TOF-SIMS
Authors: De Witte, Hilde ×
Conard, Thierry
Vandervorst, Wilfried
Gijbels, Renaat #
Issue Date: 2000
Host Document: pages:611-614
Conference: Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference; 5-10 Sept. 1999; Brussel, Belgium.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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