|ITEM METADATA RECORD
|Title: ||Accurate sheet resistance measurement on ultra-shallow profiles|
|Authors: ||Clarysse, Trudo|
|Issue Date: ||2006 |
|Conference: ||MRS Spring Meeting Symposium C: Sub-Second Rapid Thermal Processing for Device Fabrication location:Leuven Belgium date:17/04/06|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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