Title: Accurate sheet resistance measurement on ultra-shallow profiles
Authors: Clarysse, Trudo
Moussa, Alain
Leys, Frederik
Loo, Roger
Vandervorst, Wilfried
Benjamin, Mark
Hillard, Robert
Faifer, Vladimir
Current, Michael
Lin, Rong
Petersen, Dirch
Issue Date: 2006
Conference: MRS Spring Meeting Symposium C: Sub-Second Rapid Thermal Processing for Device Fabrication location:Leuven Belgium date:17/04/06
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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