Title: Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy
Authors: De Wolf, Peter ×
Stephenson, Robert
Trenkler, Thomas
Clarysse, Trudo
Hantschel, Thomas
Vandervorst, Wilfried #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:B18 issue:1 pages:361-368
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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