Title: Degradation of Clean Si-Surfaces Due to Storage in Clean (?) Wafer Boxes
Authors: Storm, Wolfgang ×
Vandervorst, Wilfried
Alay, Josep Lluis
Meuris, Marc
Opdebeeck, Ann
Heyns, Marc
Polleunis, C
Bertrand, P #
Issue Date: 1994
Host Document: pages:367-370
Conference: Proceedings 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS); September 19-21, 1994; Brugge, Be location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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