ITEM METADATA RECORD
Title: Reliability: a possible showstopper for oxide thickness scaling?
Authors: Degraeve, Robin ×
Kaczer, Ben
Groeseneken, Guido #
Issue Date: 2000
Series Title: Semiconductor Science and Technology vol:15 issue:5 pages:436-444
ISSN: 0268-1242
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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