Title: Ultra-thin oxide reliability: searching for the thickness scaling limit
Authors: Degraeve, Robin ×
Kaczer, Ben
Groeseneken, Guido #
Issue Date: 2000
Series Title: Microelectronics Reliability vol:40 issue:04/05/07 pages:697-701
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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