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|ITEM METADATA RECORD
|Title: ||Electrical and microstructural characterization of narrow Cu interconnects|
|Authors: ||Wu, Wen|
Van Hove, Marleen
|Issue Date: ||2003 |
|Conference: ||Advanced Metallization Conference location:Montreal, Canada date:21/10/03|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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