Title: HREM Characterization of Oxygen Ion Beam Sputtered Epitaxial CoSi2
Authors: Bender, Hugo ×
De Coster, Walter
Brijs, Bert
Alay, Josep Lluis
Vandervorst, Wilfried #
Issue Date: 1994
Host Document: pages:637-638
Conference: Proceedings of the 13th International Conference on Electron Microscopy (ICEM); July 17-22, 1994; Paris, France. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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