|ITEM METADATA RECORD
|Title: ||Simulations of diffusion barrier deposition on porous low-k films|
|Authors: ||Yanovitskaya, Z.S ×|
Maex, Karen #
|Issue Date: ||Nov-2003 |
|Series Title: ||Microelectronic Engineering vol:70 issue:02/04/07 pages:363-367|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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