Title: Simulations of diffusion barrier deposition on porous low-k films
Authors: Yanovitskaya, Z.S ×
Zverev, A.V
Shamiryan, Denis
Maex, Karen #
Issue Date: Nov-2003
Series Title: Microelectronic Engineering vol:70 issue:02/04/07 pages:363-367
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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