Title: Low Temperature Anneal of Electron Irradiation Induced Defects in p-Type Silicon
Authors: Trauwaert, Marie-Astrid
Vanhellemont, Jan
Maes, Herman
Van Bavel, Mieke
Langouche, Guido
Clauws, P
Issue Date: 1994
Conference: 1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science