Title: Low dielectric constant materials for microelectronics
Authors: Maex, Karen ×
Baklanov, Mikhaïl
Shamiryan, Denis
Iacopi, Francesca
Brongersma, Sywert
Yanovitskaya, Z.S #
Issue Date: Jun-2003
Series Title: Journal of Applied Physics vol:93 issue:11 pages:8793-8841
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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