Title: Alpha-Ta formation and its impact on electromigration
Authors: Demuynck, Steven
Tokei, Zsolt
Bruynseraede, Christophe
Michelon, Julien
Maex, Karen
Issue Date: 2003
Conference: Advanced Metallization Conference location:Montreal, Canada date:21/10/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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