Title: Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Authors: Abell, Thomas
Shamiryan, Denis
Patz, Matthias
Maex, Karen
Issue Date: 2003
Conference: Advanced Metallization Conference location:Montreal, Canada date:21/10/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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