|ITEM METADATA RECORD
|Title: ||Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics|
|Authors: ||Abell, Thomas|
|Issue Date: ||2003 |
|Conference: ||Advanced Metallization Conference location:Montreal, Canada date:21/10/03|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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