Title: Effective work function modulation control: the trick is in the dielectric!
Authors: Pantisano, Luigi
Afanas'ev, Valeri
Schram, Tom
Shamuilla, S.
Akheyar, Amal
O'Sullivan, Barry
Conard, Thierry
Stesmans, Andre
De Gendt, Stefan
Groeseneken, Guido
Zimmerman, Paul
Heyns, Marc
Ravel, L. #
Issue Date: 2006
Host Document: 14th Workshop on Dielectrics in Microelectronics - WoDiM
Conference: 14th Workshop on Dielectrics in Microelectronics - WoDiM location:Leuven Belgium date:26/06/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
Molecular Design and Synthesis
Electrical Engineering - miscellaneous
Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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