Title: RBS Analysis of Artefacts Induced by Low Energy Ion Sputtering
Authors: Brijs, Bert
De Coster, Walter
Bender, Hugo
Storm, Wolfgang
Osiceanu, Petre
Vandervorst, Wilfried
Issue Date: 1994
Conference: 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section

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