ITEM METADATA RECORD
Title: Advanced material characterization by TOFSIMS in microelectronics
Authors: Conard, Thierry ×
Vandervorst, Wilfried #
Issue Date: 2005
Publisher: Springer
Host Document: pages:437-447
Conference: Materials for Information Technology. Devices, Interconnects and Packaging location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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