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Title: A good gate dielectric on Ge: more than just picking the right materialÂ…
Authors: Caymax, Matty
Van Elshocht, Sven
Houssa, Michel
Delabie, Annelies
Conard, Thierry
Van Steenbergen, Jan
Bonzom, Renaud
Nelis, Daniel
Meuris, Marc
Heyns, Marc
Dimoulas, A. #
Issue Date: 2006
Conference: Semicon Europe 2006 SEMI Technology Arena on Challenges of the New Materials in Semiconductor Manufacturing location:Leuven Belgium date:05/04/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Department of Materials Engineering - miscellaneous
# (joint) last author

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