Title: Diffusion, activation, and regrowth behavior of high dose P implants in Ge
Authors: Satta, Alessandra ×
Simoen, Eddy
Duffy, Ray
Janssens, Tom
Clarysse, Trudo
Benedetti, Alessandro
Meuris, Marc
Vandervorst, Wilfried #
Issue Date: Apr-2006
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:88 issue:16 pages:162118
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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