Title: Low temperature selective growth of epitaxial Si and Si1-xGex layers from SiH4 and GeH4 in an ultrahigh vacuum, very low pressure chemical vapour deposition reactor: kinetics and possibilities
Authors: Caymax, Matty ×
Poortmans, Jef
Van Ammel, Annemie
Libezny, Milan
Nijs, Johan
Mertens, Robert #
Issue Date: 1994
Series Title: Thin Solid Films vol:241 issue:01/02/07 pages:324-328
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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