Title: On the Relation Between Low-Temperature Epitaxial Growth Conditions and the Surface Morphology of Epitaxial Si and Si1-xGex Layers, Grown in an Ultrahigh Vacuum, Very Low Pressure Chemical Vapour Deposition Reactor
Authors: Caymax, Matty ×
Poortmans, Jef
Van Ammel, Annemie
Vanhellemont, Jan
Libezny, Milan
Nijs, Johan
Mertens, Robert #
Issue Date: 1994
Series Title: Thin Solid Films vol:241 issue:01/02/07 pages:335-339
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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