Title: Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Authors: Iacopi, Francesca ×
Brongersma, Sywert
Abell, Thomas
Maex, Karen #
Issue Date: 2003
Publisher: MRS
Host Document: pages:383-388
Conference: Polymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers location:Leuven Belgium date:02/12/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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