Title: RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
Authors: De Coster, Walter ×
Brijs, Bert
Bender, Hugo
Alay, Josep Lluis
Vandervorst, Wilfried #
Issue Date: 1994
Series Title: Vacuum vol:45 issue:4 pages:389-395
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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