Title: Stress and stress gradient compensation technique for MEM actuators
Authors: Klaasse, Gerard
Puers, Robert
Tilmans, Harrie
Issue Date: 2006
Publisher: Ed. Academiei Romane
Host Document: pages:190-195
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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