ITEM METADATA RECORD
Title: Ni-based silicides for 45 nm CMOS and beyond
Authors: Lauwers, Anne ×
Kittl, Jorge
Van Dal, Mark
Chamirian, O
Kmieciak, Malgorzata
de Potter de ten Broeck, Muriel
Lindsay, Richard
Raymakers, Toon
Pagès, Xavier
Mebarki, Bencherki
Mandrekar, Tushar
Maex, Karen #
Issue Date: 2004
Series Title: Materials Science and Engineering B vol:114-115 pages:29-41
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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