Title: Challenges of clean/strip processing for Cu/LowK technology
Authors: Baklanov, Mikhaïl ×
Le, Quoc Toan
Kesters, Els
Iacopi, Francesca
Van Aelst, Joke
Struyf, Herbert
Boullart, Werner
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 2004
Publisher: IEEE
Conference: Proceedings of the IEEE International Interconnect Technology Conference - IITC location:San Francisco, CA, USA date:07/06/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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