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Title: Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25µm technologies
Authors: Steegen, An
De Wolf, Ingrid
Maex, Karen #
Issue Date: 1999
Series Title: J. Appl. Phys. vol:86 issue:8 pages:4290-4297
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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