5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, Location: Leuven Belgium
Publication date:
1999-01-01
Pages:
411 -
419
Author:
Stephenson, Robert
De Wolf, Peter ; Trenkler, Thomas ; Hantschel, Thomas ; Clarysse, Trudo ; Jansen, Philippe ; Vandervorst, Wilfried