Title: Cross-section nano-indentation for rapid adhesion evaluation
Authors: Brongersma, Sywert ×
Degryse, Dominiek
Souiller, Jérôme
Vandevelde, Bart
Maex, Karen #
Issue Date: 2004
Publisher: MRS
Conference: Materials Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics location:San Francisco, CA, USA date:13/04/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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