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Title: Ni silicide morphology on small features
Authors: Chamirian, Oxana ×
Lauwers, Anne
Kittl, Jorge
Van Dal, Mark
de Potter de ten Broeck, Muriel
Vrancken, Christa
Lindsay, Richard
Maex, Karen #
Issue Date: 2004
Publisher: Materials Research Society
Conference: Silicon Front-End Junction Formation - Physics and Technology location:San Francisco, CA, USA date:12/04/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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