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|ITEM METADATA RECORD
|Title: ||Ni silicide morphology on small features|
|Authors: ||Chamirian, Oxana ×|
Van Dal, Mark
de Potter de ten Broeck, Muriel
Maex, Karen #
|Issue Date: ||2004 |
|Publisher: ||Materials Research Society|
|Conference: ||Silicon Front-End Junction Formation - Physics and Technology location:San Francisco, CA, USA date:12/04/04|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Production Engineering, Machine Design and Automation (PMA) Section|
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author|
# (joint) last author|
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