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Title: Electrostatic fringing-field actuator (EFFA): application towards a low-complexity RF-MEMS technology
Authors: Rottenberg, Xavier
Nolmans, Philip
Ekkels, Phillip
Czarnecki, Piotr
Mertens, Robert
Nauwelaers, Bart
De Wolf, Ingrid
De Raedt, Walter
Tilmans, Harrie #
Issue Date: Jan-2007
Publisher: IEEE
Host Document: Technical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems - MEMS pages:203-206
Conference: Technical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems - MEMS date:21 January 2007
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
# (joint) last author

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