This item still needs to be validated !
ITEM METADATA RECORD
Title: Effects of pre-amorphization implantation (PAI) in ultra shallow junctions formed by SPER in deep sub-micron devices
Authors: Severi, Simone ×
Henson, Kirklen
Lindsay, Richard
De Meyer, Christina #
Issue Date: Jan-2004
Publisher: IMEC
Host Document: pages:69-72
Conference: 5th European Workshop on Ultimate Integration of Silicon - ULIS location:Leuven Belgium date:20/03/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.