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Title: Effects of pre-amorphization implantation (PAI) in ultra shallow junctions formed by SPER in deep sub-micron devices
Authors: Severi, Simone ×
Henson, Kirklen
Lindsay, Richard
De Meyer, Christina #
Issue Date: Jan-2004
Publisher: IMEC
Host Document: pages:69-72
Conference: 5th European Workshop on Ultimate Integration of Silicon - ULIS location:Leuven Belgium date:20/03/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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