MOSFET with La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow
Publication date:
2005-01-01
Author:
Pantisano, Luigi
Conard, Thierry ; Claes, Martine ; Demand, Marc ; Deweerd, Wim ; De Gendt, Stefan ; Heyns, Marc ; Houssa, Michel ; Aoulaiche, Marc ; Lujan, Guilherme ; Ragnarsson, Lars-Ake ; Rohr, Erika ; Schram, Tom ; Hooker, Jacob ; Rittersma, Chris ; Fompereyne, Jean ; Locquet, Jean-Pierre ; Dimoulas, A