Title: MOSFET with La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow
Authors: Pantisano, Luigi
Conard, Thierry
Claes, Martine
Demand, Marc
Deweerd, Wim
De Gendt, Stefan
Heyns, Marc
Houssa, Michel
Aoulaiche, Marc
Lujan, Guilherme
Ragnarsson, Lars-Ake
Rohr, Erika
Schram, Tom
Hooker, Jacob
Rittersma, Chris
Fompereyne, Jean
Locquet, Jean-Pierre
Dimoulas, A
Issue Date: 2005
Conference: MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors location:Leuven Belgium date:24/04/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Molecular Design and Synthesis
Electrical Engineering - miscellaneous

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