ITEM METADATA RECORD
Title: Modeling and experiments of boron diffusing during sub-millisecond non-melt laser annealing in silicon
Authors: Noda, Taiji ×
Felch, Susan
Parihar, Vijay
Vrancken, Christa
Janssens, Tom
Bender, Hugo
Vandervorst, Wilfried #
Issue Date: 2006
Publisher: MRS
Host Document: pages:C05-06
Conference: Doping Engineering for Device Fabrication Doping Engineering for Device Fabrication Doping Engineering for Device Fabrication location:Leuven Belgium date:17/04/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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