ITEM METADATA RECORD
Title: Electrochemical study on the mechanism of copper depostion on silicon surfaces in HF solutions
Authors: Teerlinck, Ivo
Gomes, W
Mertens, Paul
Heyns, Marc
Issue Date: 1999
Conference: MRS Spring Meeting Symposium on Ultraclean Processing of Semiconductor Structures and Devices; April 1999; San Francisco, Ca, US location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine
Department of Materials Engineering - miscellaneous
Surface and Interface Engineered Materials

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