Title: Low temperature spike anneal for Ni-Silicide formation
Authors: Lauwers, Anne ×
Kittl, Jorge
Van Dal, Mark
Chamirian, O
Lindsay, Richard
de Potter de ten Broeck, Muriel
Demeurisse, Caroline
Vrancken, Christa
Maex, Karen #
Issue Date: Nov-2004
Series Title: Microelectronic Engineering vol:76 issue:01/04/07 pages:303-310
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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