Title: The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Authors: Van Dal, Mark ×
Jawarani, D
Van Berkum, J.G.M
Kaiser, M
Kittl, Jorge
Vrancken, Christa
de Potter de ten Broeck, Muriel
Lauwers, Anne
Maex, Karen #
Issue Date: Dec-2004
Series Title: Journal of Applied Physics vol:96 issue:12 pages:7568-7573
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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