Title: Molecular beam epitaxy for advanced gate stack materials and processes
Authors: Locquet, Jean-Pierre
Marchiori, Chiara
Sousa, M.
Siegwart, H.
Caimi, D.
Fompeyrine, Jean
Pantisano, Luigi
Claes, Martine
Conard, Thierry
Demand, Marc
Deweerd, Wim
De Gendt, Stefan
Heyns, Marc
Houssa, Michel
Aoulaiche, Marc
Lujan, Guilherme
Ragnarsson, Lars-Ake
Rohr, Erika
Schram, Tom
Hooker, Jacob
Rittersma, Chris
Furukawa, Yukiko
Seo, Jin Won
Dimoulas, A.
Issue Date: 2005
Conference: MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors location:Ruschlikon CH date:28/03/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Molecular Design and Synthesis
Electrical Engineering - miscellaneous
Physical Metallurgy and Materials Engineering Section (-)
Department of Materials Engineering - miscellaneous

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