Title: Electrochemical study of copper depostion on silicon surfaces in HF solutions
Authors: Teerlinck, Ivo ×
Gomes, W. P
Strubbe, K
Mertens, Paul
Heyns, Marc #
Issue Date: 1999
Host Document: pages:156-159
Conference: Electrochemical Processing in ULSI Fabrication and Semiconductor/Metal Deposition II; 2-6 May 1999; Seattle, WA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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