Title: Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth
Authors: Pawlak, Bartek ×
Lindsay, Richard
Surdeanu, Radu
Dieu, Björn
Geenen, Luc
Hoflijk, Ilse
Richard, Olivier
Duffy, Ray
Clarysse, Trudo
Brijs, Bert
Vandervorst, Wilfried #
Issue Date: Jan-2004
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:22 issue:1 pages:297-301
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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