Title: Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth
Authors: Pawlak, Bartek ×
Vandervorst, Wilfried
Smith, A.J
Cowern, Nick E.B
Colombeau, B
Pagès, Xavier #
Issue Date: Mar-2005
Series Title: Applied Physics Letters vol:86 issue:10 pages:101913
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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