Title: Direct observation of 2-D dopant profiles of MOSFETs activated by millisecond anneal
Authors: Adachi, K ×
Ohuchi, K
Aoki, N
Tanimoto, H
Tsujii, H
Eyben, Pierre
Vanhaeren, Danielle
Vandervorst, Wilfried
Ishimaru, K
Ishiuchi, H #
Issue Date: 2006
Publisher: IEEE
Host Document: pages:104-107
Conference: International Workshop on Junction Technology - IWJT location:Japan date:15/05/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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