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Title: Fabrication of 100 nm pitch copper interconnects by electron beam lithography
Authors: Wu, Wen ×
Jonckheere, Rik
Tokei, Zsolt
Brongersma, Sywert
Van Hove, Marleen
Maex, Karen #
Issue Date: 2004
Series Title: Journal of Vacuum Science and Technology B vol:22 issue:4 pages:L11-L14
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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