Title: Process and properties of porous low-k dielectrics
Authors: Travaly, Youssef
Van Hove, Marleen
Beyer, Gerald
Maex, Karen
Issue Date: 2003
Conference: American Vacuum Society Conference location:Montreal, Canada date:02/11/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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