|ITEM METADATA RECORD
|Title: ||Process and properties of porous low-k dielectrics|
|Authors: ||Travaly, Youssef|
Van Hove, Marleen
|Issue Date: ||2003 |
|Conference: ||American Vacuum Society Conference location:Montreal, Canada date:02/11/03|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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