Title: Nondestructive characterization of thin silicides using x-ray reflectivity
Authors: Detavernier, C ×
De Gryse, R
Van Meirhaeghe, R. L
Cardon, F
Ruttens, Gerlinde
Qu, X. P
Li, Bing-Zong
Donaton, R. A
Maex, Karen #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:A18 issue:1 pages:470-476
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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