Title: Controlling CoSi2 nucleation: the effect of entropy of mixing
Authors: Detavernier, C
Van Meirhaeghe, R. L
Maex, Karen
Cardon, F
Issue Date: 2000
Conference: MRS Spring Meeting Symposium: Gate stack and silicide issues in silicon processing; 2000;
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.