|ITEM METADATA RECORD
|Title: ||Silicide engineering: influence of alloying elements on CoSi2 nucleation|
|Authors: ||Detavernier, C|
Van Meirhaeghe, R. L
|Issue Date: ||2000 |
|Conference: ||MRS Spring Meeting Symposium: Gate stack and silicide issues in silicon processing; 2000;|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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