Title: Active dopant characterization methodology for germanium
Authors: Clarysse, Trudo ×
Eyben, Pierre
Janssens, Tom
Hoflijk, Ilse
Vanhaeren, Danielle
Satta, Alessandra
Meuris, Marc
Vandervorst, Wilfried
Bogdanowicz, Janusz
Raskin, G #
Issue Date: Jan-2006
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:24 issue:1 pages:381-389
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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