Title: Towards nondestructive carrier depth profiling
Authors: Clarysse, Trudo ×
Vandervorst, Wilfried
Bakshi, Mira
Nicolaides, Lena
Salnik, Alex
Opsal, Jon #
Issue Date: May-2006
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:24 issue:3 pages:1139-1146
Conference: 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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